POLISHING HEAD AND POLISHING APPARATUS,申请号KR20117004010-传众专利搜索

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发明名称	POLISHING HEAD AND POLISHING APPARATUS
摘要
申请公布号	KR20110052649(A)	申请公布日期	2011.05.18
申请号	KR20117004010	申请日期	2009.08.07
申请人	SHIN-ETSU HANDOTAI CO., LTD.;FUJIKOSHI MACHINERY CORPORATION	发明人	MASUMURA HISASHI;HASHIMOTO HIROMASA;MORITA KOUJI;KISHIDA HIROMI;ARAKAWA SATORU
分类号	B24B37/005;B24B37/30;H01L21/304	主分类号	B24B37/005
代理机构		代理人
主权项
地址

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