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发明名称
Support for vertically oriented capacitors during the formation of a semiconductor device
摘要
申请公布号
EP1665372(B1)
申请公布日期
2011.05.18
申请号
EP20040786595
申请日期
2004.08.26
申请人
ROUND ROCK RESEARCH, LLC
发明人
MANNING, MONTGOMERY, H.
分类号
H01L21/8242;H01L21/02;H01L27/108
主分类号
H01L21/8242
代理机构
代理人
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