| 摘要 |
PURPOSE: A table aligner is provided to easily align a table using a plurality of members whose entire length is varied, thereby shortening time for aligning substrates. CONSTITUTION: A table aligner comprises single acting cylinders(11), an upper table(31), an upper chamber(21), a lower chamber, a lower table, a pressure adjusting unit(40), and a controller(50). The single acting cylinders include a first member, a second member, and a varying member. The first member includes an inlet. The second member is separated from the first member. The varying member varies the interval between the first member and the second member. An upper substrate is mounted on the upper table. A controller controls the pressure adjusting unit. |
