发明名称 |
Integrated circuit with upstanding stylus |
摘要 |
A stylus, an integrated circuit (IC) and method of forming the IC. The stylus extends upward from its apex and has a substantially circular cross section that decreases in diameter upward from the apex. The stylus is formed in a mold that may be formed in an orifice in a dielectric layer between wiring layers. The mold may include multiple concentric layers. For a more pronounced, non-linear stylus taper, each layer may be thinner than its next adjacent outer concentric layer.
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申请公布号 |
US7943919(B2) |
申请公布日期 |
2011.05.17 |
申请号 |
US20030732579 |
申请日期 |
2003.12.10 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
HORAK DAVID V.;LAM CHUNG H. |
分类号 |
H01L45/00;H01L21/4763;H01L27/24;H01L47/00 |
主分类号 |
H01L45/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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