发明名称 Photocathode lighting device, method for manufacturing the same and exposure apparatus using photocathode lighting device
摘要 The photocathode lighting device of planar light emission including: a light source unit emitting a first light; a cathode plate contacted face-to-face with the light source unit; a metal mask layer adhered to the cathode plate and including a repetitive plurality of apertures; a photocathode formed on a surface of the metal mask layer, receiving the first light, and emitting an electron; an anode plate facing the cathode plate and spaced apart from the cathode plate; and a phosphor formed in a lower part of the anode plate and emitting a second light when the emitted electron collides with the phosphor.
申请公布号 US7944146(B2) 申请公布日期 2011.05.17
申请号 US20070373405 申请日期 2007.07.13
申请人 PHOTEGRA CORPORATION 发明人 JEONG HYO-SOO;KELLER KRISTOPHER WARREN;CULKIN JOSEPH BRADLEY
分类号 H01J31/50 主分类号 H01J31/50
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