发明名称 |
Method and apparatus for preventing the formation of a plasma-inhibiting substance |
摘要 |
A system and method for preventing formation of a plasma-inhibiting substance within a plasma chamber is provided. In one embodiment, an apparatus that includes a barrier component configured to be disposed within a plasma chamber. The barrier component includes a wall that defines a plasma formation region where a chemically-reducing species is formed from a fluid. A portion of the wall is formed of a substance that is substantially inert to the chemically-reducing species. The wall prevents the chemically-reducing species from interacting with an inner surface of the plasma chamber to form a conductive substance. The barrier component also includes an opening in fluid communication with the plasma formation region. The fluid is introduced into the plasma formation region via the opening.
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申请公布号 |
US7942112(B2) |
申请公布日期 |
2011.05.17 |
申请号 |
US20060566610 |
申请日期 |
2006.12.04 |
申请人 |
ADVANCED ENERGY INDUSTRIES, INC. |
发明人 |
TOMASEL FERNANDO GUSTAVO;MAUCK JUSTIN;SHABALIN ANDREW;SHAW DENIS;GONZALEZ JUAN JOSE |
分类号 |
C23C16/00;C23F1/00;H01L21/306;H05B31/26 |
主分类号 |
C23C16/00 |
代理机构 |
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主权项 |
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地址 |
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