发明名称 Method for surface modification
摘要 A method for surface modification is disclosed. The method includes the step of irradiating a material with ultrashort pulse laser light to form a modified region including an amorphous region and/or a strain region on a surface of the material.
申请公布号 US7943533(B2) 申请公布日期 2011.05.17
申请号 US20070764996 申请日期 2007.06.19
申请人 SONY CORPORATION 发明人 MIZUNO TAKESHI
分类号 H01L21/00 主分类号 H01L21/00
代理机构 代理人
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