Flexible force sensor with coupling type and multi-directional recognitions

摘要

A force sensor includes a substrate, a support layer, a film, a plurality of sensing portions, a plurality of electrodes, a plurality of sensing materials, and a filler. The support layer is disposed on the substrate. The film is supported by the support layer. The sensing portions extend from the film. The electrodes are correspondingly disposed on the sensing portions. The sensing materials are correspondingly disposed on the electrodes. The support layer, the film, the sensing portions, the electrodes, and the sensing materials encapsulated by the filler.