发明名称 Semiconductor wafer sawing system and method
摘要 Semiconductor wafer sawing systems and methods are described in which a wafer may be secured in a sawing position having a surface exposed to incur sawing with at least a portion of the exposed wafer surface positioned below the center of gravity of the wafer such that prevailing force of gravity may be used to assist in the removal of contaminants from the wafer.
申请公布号 US7943425(B2) 申请公布日期 2011.05.17
申请号 US20090402058 申请日期 2009.03.11
申请人 TEXAS INSTRUMENTS INCORPORATED 发明人 ANCHETA PATRICIO VERGARA;VILAGA HEINTJE SARDONAS;SARMIENTO ELLA CHAN
分类号 H01L21/301 主分类号 H01L21/301
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