发明名称 Semiconductor device having laminated electronic conductor on bit line
摘要 There are provided a semiconductor device and a fabrication method therefor including an ONO film (18) formed on a semiconductor substrate (10), a word line (24) formed on the ONO film (18), a bit line (20) formed in the semiconductor substrate (10), and a conductive layer (32) that is in contact with the bit line (20), runs in a length direction of the bit line (20), and includes a polysilicon layer or a metal layer. In accordance with the present invention, a semiconductor device and a fabrication method therefor are provided wherein degradation of the writing and erasing characteristics and degradation of the transistor characteristics such as a junction leakage are suppressed, and the bit line resistance is decreased.
申请公布号 US7943982(B2) 申请公布日期 2011.05.17
申请号 US20060444216 申请日期 2006.05.30
申请人 SPANSION LLC 发明人 FUJII KENICHI;HIGASHI MASAHIKO
分类号 H01L29/792 主分类号 H01L29/792
代理机构 代理人
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