发明名称 HTO offset spacers and dip off process to define junction
摘要 Memory devices having an increased effective channel length and/or improved TPD characteristics, and methods of making the memory devices are provided. The memory devices contain two or more memory cells on a semiconductor substrate and bit line dielectrics between the memory cells. The memory cell contains a pair of first bit lines and a pair of second bit lines. The first and second bit lines can be formed by an implant process using first and second spacers that have different lateral lengths from each other. The spacers can be used to offset the implants, thereby controlling the lateral lengths of the bit lines.
申请公布号 US7943983(B2) 申请公布日期 2011.05.17
申请号 US20080342011 申请日期 2008.12.22
申请人 SPANSION LLC 发明人 WU HUAQIANG;KINOSHITA HIRO;CHENG NING;RUIZ ARTURO;CHOI JIHWAN
分类号 H01L21/336;H01L27/115 主分类号 H01L21/336
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