发明名称 Active vibration isolation system with a combined position actuator
摘要 The invention relates to a vibration isolation system, comprising at least one fluid bearing having a first control device in order to control the fluid pressure and having at least one actuator in order to compensate for position changes of the load to be isolated, which actuator is controlled by at least one second control device, wherein the input of one control device is connected to the output of the other control device.
申请公布号 US7942379(B2) 申请公布日期 2011.05.17
申请号 US20070750243 申请日期 2007.05.17
申请人 INTEGRATED DYNAMICS ENGINEERING GMBH 发明人 HEILAND PETER
分类号 F16F15/02;F15B21/04;G03F7/20 主分类号 F16F15/02
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