发明名称 |
SEMICONDUCTOR DIE CONTACT STRUCTURE AND METHOD |
摘要 |
PURPOSE: A semiconductor die contact structure is provided to reduce flow resistance from a conductive pillar to a metal layer by forming the conductive pillar in contact with a first metal contact unit instead of a contact pad. CONSTITUTION: A metallization layer(103) is formed on a substrate(101). The metallization layer includes a first dielectric layer(109), a second dielectric layer(111), a first conductive layer(113), and a second conductive layer(115). A first passivation layer(107) is formed on the uppermost conductive layer. A first metal contact unit(105) is positioned in the first passivation layer. The first metal contact unit has the thickness of 15000 angstroms. |
申请公布号 |
KR20110051136(A) |
申请公布日期 |
2011.05.17 |
申请号 |
KR20100096007 |
申请日期 |
2010.10.01 |
申请人 |
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. |
发明人 |
LIU CHUNG SHI;YU CHEN HUA |
分类号 |
H01L21/60;H01L23/48 |
主分类号 |
H01L21/60 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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