发明名称 SEMICONDUCTOR DIE CONTACT STRUCTURE AND METHOD
摘要 PURPOSE: A semiconductor die contact structure is provided to reduce flow resistance from a conductive pillar to a metal layer by forming the conductive pillar in contact with a first metal contact unit instead of a contact pad. CONSTITUTION: A metallization layer(103) is formed on a substrate(101). The metallization layer includes a first dielectric layer(109), a second dielectric layer(111), a first conductive layer(113), and a second conductive layer(115). A first passivation layer(107) is formed on the uppermost conductive layer. A first metal contact unit(105) is positioned in the first passivation layer. The first metal contact unit has the thickness of 15000 angstroms.
申请公布号 KR20110051136(A) 申请公布日期 2011.05.17
申请号 KR20100096007 申请日期 2010.10.01
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 LIU CHUNG SHI;YU CHEN HUA
分类号 H01L21/60;H01L23/48 主分类号 H01L21/60
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