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发明名称
VERFAHREN ZUR HERSTELLUNG VON VAKUUM-PLASMA BEHANDELTEN WERKSTÜCKEN
摘要
申请公布号
AT509135(T)
申请公布日期
2011.05.15
申请号
AT20040738110T
申请日期
2004.07.26
申请人
OERLIKON SOLAR AG, TRUEBBACH
发明人
ELYAAKOUBI, MUSTAPHA;AING, PHANNARA;OSTERMANN, RAINER;NEUBECK, KLAUS;RIOU, BENOIT
分类号
C23C16/44;C23F1/00;H01J37/32;H05H1/24
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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