FABRICATNG APPARATUS FOR PLAT DISPLAY DEVICE

摘要

PURPOSE: A manufacturing apparatus for a plat display device is provided to improve production efficiency by depositing a glass substrate and a plastic film at the same time. CONSTITUTION: In a manufacturing apparatus for a plat display device, a first process chamber(40) forms a first thin film on a glass substrate which is transferred through an inline method. A second process chamber(60) forms a second thin film on a plastic film. A loadlock chamber(20) transfers the glass substrates between a transfer chamber(30) and a load / unload unit(10). The transfer chamber transfers the glass substrates between the first process chamber and the loadlock chamber. A power supply unit supplies power to the first and second process chamber at the same time.