Funkenerosionsvorrichtung, Funkenerosionsverfahren und Verfahren zur Herstellung eines Halbleitersubstrats

摘要

An electric discharge machining apparatus includes: electrodes the total quantity of which is equal to N; an alternating-current power source; and capacitors the total quantity of which is equal to N. The alternating-current power source applies an alternating voltage commonly to the electrodes. One end of each of the capacitors is connected to a corresponding one of the electrodes, whereas the other ends of the capacitors are commonly connected to the alternating-current power source.