| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a downsized electrostatic acceleration sensor which increases sensitivity. <P>SOLUTION: The electrostatic acceleration sensor includes a sensor body 1 including a frame section 11, a weight section 13, a pair of torsion beams 12, 12, and two movable electrodes 15, 15; a first cover substrate 2 and a second cover substrate 3 jointed to sensor body 1; and stationary electrodes 25, 25 disposed facing the movable electrodes 15, 15, respectively, in the first cover substrate 2. Each of the stationary electrodes 25, 25 is connected to a pad 18, that is a first external connection electrode at the side of the first cover substrate 2 in an island section 16, via a connection wiring 26 formed at the side of the sensor body 1 in the first cover substrate 2 and being mutually associated with the stationary electrodes 25, 25 and the island section 16, arranged in the opening window 14 of the weight section 13 of the sensor body 1. Each of the movable electrodes 15, 15 is connected to pads 18, 18 that is a second external connection electrode on the side of the first cover substrate 2. <P>COPYRIGHT: (C)2011,JPO&INPIT |
