CRYO PUMP, AND VACUUM PUMPING METHOD

摘要

Disclosed is a cryo pump (10) comprising: a first cryo panel that comprises a radiation shield (18) having a shield opening (20) and a louver (23) arranged on the shield opening (20); a second cryo panel (24) surrounded by the first cryo panel; and a freezing machine (14) for cooling the first cryo panel to a first cooling temperature and cooling the second cryo panel to a second cooling temperature that is lower than the first cooling temperature. The louver (23) has a rough surface (42) formed thereon.