| 摘要 |
PROBLEM TO BE SOLVED: To readily obtain the state of a substrate processing apparatus that is used for manufacturing a substrate of a printed wiring board or the like; and to prevent decrease in operating rate of production facility by performing maintenance of the facility in a proper timely manner. SOLUTION: The substrate processing apparatus includes: a means for carrying a substrate at a predetermined speed; a spray wand to which multiple spray nozzles are attached; a pump that supplies a processing liquid to the spray wand; and a pressure indicator provided at an optional position of a flow path in the pump and spray wand, and at an end point of the spray wand. COPYRIGHT: (C)2011,JPO&INPIT |
