| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface emitting laser element capable of also improving packaging accuracy as well as coupling efficiency of a laser beam to a grating coupler, and to provide a method of manufacturing the surface emitting laser element. SOLUTION: A thick insulating film 28 with translucency is formed on a semiconductor layer 20, and there is formed a ring-shaped groove 28A which reaches an n-type DBR layer 21 in the semiconductor layer 20 from this insulating film 28. While forming a mask (resist layer 34) on the insulating film 28, the groove 28A is filled up, and an opening 34A is provided in a near position of the groove 28A of this resist layer 34. A prism 3 with an inclined light emission surface 3A is formed by introducing etchant from this opening 34A to process the insulating film 28. Thereby, there can be obtained a surface emitting laser element 1 which emits the laser beam inclining rather than a perpendicular direction to a light emission surface 20A of an element body 2. COPYRIGHT: (C)2011,JPO&INPIT
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