| 摘要 |
In a vacuum treatment apparatus according to an embodiment of the present invention, a control means performs, when treatment in a vacuum vessel using a flammable gas (step S2) ends, a step of closing a first valve and performing evacuation (step S3), a step of closing a second valve (step S4) after the evacuation, and a step of opening a fifth valve to supply an inert gas in a third vessel to a first supply line (step S5), and, when treatment in the vacuum vessel using a combustion-supporting gas (step S8) ends, a step of closing a third valve and performing evacuation (step S9), a step of closing a fourth valve (step S10) after the evacuation, and a step of opening a sixth valve to supply an inert gas in a fourth vessel to a second supply line (step S11).
|
