发明名称 |
SYSTEM AND METHOD FOR HANDLING MULTIPLE WORKPIECES FOR MATRIX CONFIGURATION PROCESSING |
摘要 |
A system for loading workpieces into a process chamber for processing in a matrix configuration includes a conveyor configured to transport multiple workpieces in a linear fashion. A workpiece hotel is configured to receive the multiple workpieces from the conveyor. The workpiece hotel comprises a matrix of cells arranged in N columns and M floors. A pick blade is configured to insert into the hotel and retract from the hotel in order to unload a plurality of substrates from a first floor into a single row of the pick blade, and to repeat the unloading operation to form a matrix comprising a plurality of rows of substrates disposed on the pick blade. In one example, the workpiece hotel has a staggered configuration that provides individual accessibility of each hotel cell. |
申请公布号 |
US2011108742(A1) |
申请公布日期 |
2011.05.12 |
申请号 |
US20100941656 |
申请日期 |
2010.11.08 |
申请人 |
VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES, INC. |
发明人 |
WEAVER WILLIAM T.;CARRERA JAIME A.;VOPAT ROBERT B.;WEBB AARON;CARLSON CHARLES T. |
分类号 |
H01L21/677;B25J11/00;B65G1/04;B65G1/10;B65G65/00;G21K5/10 |
主分类号 |
H01L21/677 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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