发明名称 EPITAXIAL GRAPHENE ON SIC, HAVING AN OPEN GAP AND MOBILITY COMPARABLE TO THAT OF STANDARD ZERO-GAP GRAPHENE
摘要 <p>The invention relates to a method for manufacturing a modified structure (801) comprising a layer of semiconductor modified graphene (83) on a substrate (82), including the following consecutive steps: providing an initial structure (800) comprising at least one substrate (81), forming a graphene layer (82) on the substrate, and hydrogenating the initial structure (800) by means of exposing said structure to atomic hydrogen (85), and characterized in that the step of hydrogenating the graphene layer is carried out with a exposure dose of between 100 and 4,000 Langmuirs, and forms a modified graphene layer.</p>
申请公布号 WO2011054968(A1) 申请公布日期 2011.05.12
申请号 WO2010EP67134 申请日期 2010.11.09
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE ET AUX ENERGIESALTERNATIVES;CHIANG, SHIRLEY;ENRIQUEZ, HANNA;OUGHADDOU, HAMID;SOUKIASSIAN, PATRICK;TEJEDA GALA, ANTONIO;VIZZINI, SEBASTIEN 发明人 CHIANG, SHIRLEY;ENRIQUEZ, HANNA;OUGHADDOU, HAMID;SOUKIASSIAN, PATRICK;TEJEDA GALA, ANTONIO;VIZZINI, SEBASTIEN
分类号 H01L21/02;H01L21/20 主分类号 H01L21/02
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