FERROELECTRIC THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a ferroelectric thin film formed on a substrate and having an amount of remanent polarization increased in its entirety.

SOLUTION: The ferroelectric thin film includes a perovskite-type metal oxide formed on a substrate. The ferroelectric thin film further includes a columnar structure group formed of multiple columns each formed of a spinel-type metal oxide. The columnar structure group is in a state of standing in a direction perpendicular to the surface of the substrate, or in a state of slanting at a slant angle in a range of -10 or more to +10°or less with respect to the perpendicular direction.

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