| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a spin detector having an improved performance index, and to provide a surface analyzer using the spin detector. <P>SOLUTION: The spin detector 5 includes: a target 51 having projection parts 52 formed on a surface irradiated with electron beams, which have each inclined plane inclined with respect to a normal direction of the surface; and electron detectors DRy, DLy arranged on the direction side in which the electron beams are scattered by the inclined planes of the projection parts 52 corresponding to a spin polarization degree of the electron beams. The surface analyzer 1 includes an electron beam lens barrel 3 for irradiating a sample S surface with primary electron beams, and the spin detector 5. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
