发明名称 |
METHOD FOR PRODUCING A MULTICOMPONENT, POLYMER- AND METAL-CONTAINING LAYER SYSTEM, DEVICE AND COATED ARTICLE |
摘要 |
A method for producing layer systems on substrates includes irradiating a first vacuum coating source with an irradiating source. The first vacuum coating source includes a first layer material that is dissolved in a solvent. A second vacuum coating source is applied to the substrate via a chemical vapor deposition process. In this way, novel layer systems and mixed layers, in particular mixed layers of polymers and metals or metal oxides can be applied.
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申请公布号 |
US2011111131(A1) |
申请公布日期 |
2011.05.12 |
申请号 |
US20080934603 |
申请日期 |
2008.03.27 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FORDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
VERGOEHL MICHAEL;NEUBERT THOMAS |
分类号 |
C23C14/46;C23C16/452 |
主分类号 |
C23C14/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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