SYSTEM, METHOD AND APPARATUS FOR PLANARIZING SURFACE WITH FUNCTIONAL POLYMER

摘要

PROBLEM TO BE SOLVED: To provide a system, a method and apparatus for planarizing surfaces by a functional polymer. SOLUTION: The surfaces of hard disk drive magnetic media disks are planarized with surface-grafted polymer chains that form a monolayer-thick film of uniform, self-limiting thickness. The thickness is controlled by the molecular weight of the polymer selected. The polymer film may be swollen by a solvent vapor to fill variable width gaps in the topography. The polymer may be crosslinked in place by radiation or thermal processing. COPYRIGHT: (C)2011,JPO&INPIT