| 摘要 |
<P>PROBLEM TO BE SOLVED: To reduce a period during which an exposure operation is stopped to exchange a filter for removing impurities from gas in an exposure chamber. <P>SOLUTION: The aligner has an exposure unit 50, an exposure chamber for housing the exposure unit, first and second filter boxes 16a and 16b for holding filters 17a and 17b, respectively, an adjusting unit 11 for adjusting states of the filters held by the first and second filter boxes, a first route for connecting the exposure chamber with one of the filter boxes so that the gas in the exposure chamber may pass and circulate through first and second route switching units 21 and 22 for route switching, and a second route for connecting the adjusting unit and the remaining filter box of the first and second filter boxes which is not connected with the first route, and adjusting the state of the filter held by the remaining filter box by the adjusting unit. <P>COPYRIGHT: (C)2011,JPO&INPIT |
