| 发明名称 |
DEVICE FOR DETECTING LEAKAGE OF LIQUID |
| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a device for detecting the leakage of liquid, which timely outputs detection signals. <P>SOLUTION: The device for detecting the leakage of liquid 10 includes: first and second detecting sections 25 and 26 which detect a liquid leaking from a manufacturing apparatus; and output control means which changes the timing of stoppage of the manufacturing apparatus on the basis of a result of the detection of the leaking liquid by the detecting sections 25 and 26. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
| 申请公布号 |
JP2011095249(A) |
申请公布日期 |
2011.05.12 |
| 申请号 |
JP20100195148 |
申请日期 |
2010.08.31 |
| 申请人 |
PANASONIC ELECTRIC WORKS SUNX CO LTD |
发明人 |
KAWASHIMA YOSHIHIDE;FURUKAWA HIROAKI;KIMURA KEISUKE |
| 分类号 |
G01M3/38 |
主分类号 |
G01M3/38 |
| 代理机构 |
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