| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing an oxide superconducting thin film in which a high temperature superconducting wire rod endowed with an excellent Jc (critical current density) and Ic (critical current value) can be manufactured. SOLUTION: The method of manufacturing the oxide superconducting thin film with an intermediate layer 2 and a superconducting layer 3 formed on an oriented metal substrate 1 includes a heat treatment process in which the oriented metal substrate is heated at a temperature capable of reduction-removing an oxidized layer formed on the oriented metal substrate inside a heat treatment chamber 22 provided in a vacuum atmosphere or a reducing atmosphere and then is cooled down to 100°C, an exposure process for extracting the heat-treated oriented metal substrate from the heat treatment chamber and exposing it in the atmosphere, and an intermediate layer forming process for forming an oxide thin film layer on the orientated metal substrate after exposure process in a film forming chamber 23. COPYRIGHT: (C)2011,JPO&INPIT
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