发明名称 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To reduce the manufacturing processes for a MOS transistor, and further prevent the threshold voltage of a parasitic MOS from being decreased. SOLUTION: The method of manufacturing a semiconductor device eliminates ion implantation of impurities for channel formation on a field oxide film 30, in the method of ion implantation of impurities for channel formation of conductivity type reverse to that of a well diffusion layer after gate electrode formation. Accordingly, the semiconductor device has a structure wherein ion implantation of impurities for channel formation is not done to the field oxide film 30. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011096862(A) 申请公布日期 2011.05.12
申请号 JP20090249673 申请日期 2009.10.30
申请人 HITACHI LTD 发明人 MIYAMOTO YASUICHIRO;SHIMAMOTO SATOSHI;OSHIMA TAKAFUMI;WADA SHINICHIRO
分类号 H01L27/088;H01L21/76;H01L21/762;H01L21/8234;H01L21/8238;H01L21/8249;H01L27/06;H01L27/08;H01L27/092;H01L29/78;H01L29/786 主分类号 H01L27/088
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