发明名称 HEAD SPACE CONTROL DEVICE
摘要 PURPOSE: A head space control device capable of controlling the intervals among apparatuses which transfer and inspect parts is provided to install a screw shaft on a servo motor, thereby precisely moving a plurality of heads. CONSTITUTION: A horizontal frame is installed in upper and lower cylinders. An LM guide(22) is installed on the bottom of a horizontal frame. A plurality of heads horizontally moves in the LM guide. A screw shaft(31) is in parallel with the LM guide on the bottom of the horizontal frame. The screw shaft is installed in a motor shaft of the sever motor and rotates forward. A head moving unit(4) moves the heads in the rotation direction of the screw shaft.
申请公布号 KR20110049087(A) 申请公布日期 2011.05.12
申请号 KR20090105933 申请日期 2009.11.04
申请人 DAEHO TECHNOLOGY CO., LTD. 发明人 JUNG, YOUNG HWA
分类号 G01R31/26;H01L21/66;H01L21/67 主分类号 G01R31/26
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