发明名称 |
HEAD SPACE CONTROL DEVICE |
摘要 |
PURPOSE: A head space control device capable of controlling the intervals among apparatuses which transfer and inspect parts is provided to install a screw shaft on a servo motor, thereby precisely moving a plurality of heads. CONSTITUTION: A horizontal frame is installed in upper and lower cylinders. An LM guide(22) is installed on the bottom of a horizontal frame. A plurality of heads horizontally moves in the LM guide. A screw shaft(31) is in parallel with the LM guide on the bottom of the horizontal frame. The screw shaft is installed in a motor shaft of the sever motor and rotates forward. A head moving unit(4) moves the heads in the rotation direction of the screw shaft. |
申请公布号 |
KR20110049087(A) |
申请公布日期 |
2011.05.12 |
申请号 |
KR20090105933 |
申请日期 |
2009.11.04 |
申请人 |
DAEHO TECHNOLOGY CO., LTD. |
发明人 |
JUNG, YOUNG HWA |
分类号 |
G01R31/26;H01L21/66;H01L21/67 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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