| 摘要 |
<p>PURPOSE: A developing method and developing apparatus are provided to optimize the reaction speed of a substrate without causing collisions with a substrate in a reaction tube. CONSTITUTION: In a developing method and developing apparatus, a substrate is fixed at a first stop position in a transfer duct to supply a developing solution to the substrate. The substrate is moved from a first stop position to a second stop position by a first speed. In the second stop position, the developing solution is substantially removed from the substrate. The lowest limit moving speed is determined. A set time is provided to a developing time until stopping developing from the second stop position.</p> |
