| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a perpendicular magnetic recording medium allowing higher recording density by comprehensively enhancing coercive force Hc, a reverse magnetic domain nucleation magnetic field Hn and an SNR. SOLUTION: The method for manufacturing the perpendicular magnetic recording medium includes a soft magnetic layer film-depositing step of film-depositing a soft magnetic layer 130 on a substrate 110, a heating step of subjecting the substrate after the soft magnetic layer is film-deposited to heating treatment, a front underlayer film-depositing step of film-depositing a front underlayer 140 consisting essentially of Ni and containing at least 1 to 5 at% B on the soft magnetic layer in a temperature rising state by the heating treatment, an underlayer film-depositing step of film-depositing an underlayer 150 consisting essentially of Ru on the front underlayer and a main recording layer film-depositing step of film-depositing a main recording layer 160 comprising magnetic particles consisting essentially of a CoCrPt alloy and a non-magnetic grain boundary part consisting essentially of an oxide on the underlayer. COPYRIGHT: (C)2011,JPO&INPIT |
