SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a semiconductor device that includes a low resistance line connection in which a graphene ballistic conduction is used, and that prevents complication of a structure of the line connection and connection part of line connection part; and to provide a method for manufacturing the semiconductor device.

SOLUTION: The semiconductor device 100 includes: a substrate; a lower layer wiring 12 with a graphene nano-ribbon layer 121 that is provided in an upper substrate and composed of a multiple graphene nano-ribbon sheet 122 laminated; and a via 14 and barrier metal 15 that penetrate at least one of multiple graphene nano-ribbon sheets 122 and connect the lower layer wiring 12 with an upper layer wiring 13.

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