发明名称 SEMICONDUCTOR OPTICAL ELEMENT AND SEMICONDUCTOR OPTICAL DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor optical element capable of selectively detecting light with a predetermined wavelength without using a filter structure, and a semiconductor optical device. SOLUTION: A thermal infrared sensor element 100 includes a temperature detection part 5 and an absorption umbrella 10 thermally connected to the temperature detection part, and detects light entering the absorption umbrella. The absorption umbrella has recesses 11 disposed in an array on the surface to induce a surface plasmon for coupling a specific wavelength to the surface, and the absorption amount of incident light of the specific wavelength is set to be larger than the absorption amount of incident light of wavelengths other than the specific wavelength. In the semiconductor optical device, a plurality of semiconductor optical elements are disposed in an array. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011095137(A) 申请公布日期 2011.05.12
申请号 JP20090250247 申请日期 2009.10.30
申请人 MITSUBISHI ELECTRIC CORP 发明人 OGAWA SHINPEI
分类号 G01J1/02;H01L35/30;H01L35/32 主分类号 G01J1/02
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