| 摘要 |
PURPOSE: An apparatus for inspecting a substrate is provided to prevent a substrate from drooping without interrupting the movement of a robot arm, thereby accurately inspecting the substrate. CONSTITUTION: A plurality of stage units(210) is separated so that a robot arm can pass among the stage units. The stage units comprise a jetting hole for jetting air onto a substrate. A plurality of sub stages(220) is installed among a plurality of stage units. The sub stages comprise a jetting hole for jetting air onto the substrate. A vision camera scans the substrate while the vision camera moves together with the substrate. A sub stage of a driving unit is far from the robot arm so that the sub stage does not interrupt the robot arm.
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