发明名称 WATER JET TYPE PUMP AND METHOD FOR OPERATION THEREOF
摘要 A water jet type pump is part of a system for generating an ultrahigh vacuum. The pump includes a pump chamber through which an ionic fluid flows at high velocity. The chamber has a first fluid feed for the fluid, the first feed ending in a nozzle with a nozzle opening, and a fluid discharge. A second feed of the pump chamber is connected to a high pressure chamber to be evacuated. Gas is suctioned out of the high vacuum chamber through the second feed by way of the flowing fluid jet, which is used to discharge the gas out of the pump chamber.
申请公布号 US2011110796(A1) 申请公布日期 2011.05.12
申请号 US20090737407 申请日期 2009.04.09
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 DANOV VLADIMIR;GROMOLL BERND
分类号 F04F9/08;F04B23/08 主分类号 F04F9/08
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