摘要 |
A water jet type pump is part of a system for generating an ultrahigh vacuum. The pump includes a pump chamber through which an ionic fluid flows at high velocity. The chamber has a first fluid feed for the fluid, the first feed ending in a nozzle with a nozzle opening, and a fluid discharge. A second feed of the pump chamber is connected to a high pressure chamber to be evacuated. Gas is suctioned out of the high vacuum chamber through the second feed by way of the flowing fluid jet, which is used to discharge the gas out of the pump chamber.
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