| 摘要 |
PROBLEM TO BE SOLVED: To provide a defect detection device capable of detecting simultaneously a black spot and a defect such as a hollow, without lowering a detection capacity of a flaw. SOLUTION: This device includes: two rows of first linear lighting systems having mutually different light emission angles to a running sheet-shaped inspection object by arranging spot light sources linearly; a second linear lighting system installed on a furthermore separated position from the inspection object than the first linear lighting systems with respect to the inspection object, and installed on the center part of the two rows; an imaging device for acquiring image data of the inspection object illuminated by the first and second linear lighting systems; and an image processing device for detecting a defect part of the inspection object by performing image processing of the image data. COPYRIGHT: (C)2011,JPO&INPIT |
