A FLOATING-TYPE COATING SYSTEM AND METHOD

摘要

PURPOSE: Floating-type coating system and method are provided to prevent the generation of the undulation of a substrate and to apply a coating liquid to a substrate in a constant height. CONSTITUTION: A floating-type coating system(240) comprises a first floating unit(276a), coating space(277), third floating unit(276c), transfer apparatus(284), nozzle apparatus and gantry(230). The first floating unit lifts a substrate(G) in a loading area. The coating space provides a coating region. The third floating unit lifts the substrate in an unloading region. The transfer apparatus transfers the substrate from the first floating unit to the third floating unit via the coating space. The nozzle apparatus is provided to in the coating space and applies the coating solution to the substrate.