| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pellicle which is manufactured by a simple manufacturing process and allows the reduction of energy required for manufacturing and has good yield because of no foaming in an adhesive layer. <P>SOLUTION: When an adhesive layer for a photomask is formed, a two-liquid mixed curable adhesive which is not required to be heated when hardening is used as an adhesive. <P>COPYRIGHT: (C)2011,JPO&INPIT |
