发明名称 HOLDING DEVICE OF OPTICAL ELEMENT, ALIGNER USING THE SAME, AND MANUFACTURING METHOD OF DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide a holding device of an optical element, reducing an eccentric shift of the optical element by an external force, also reducing variation in aberration, and providing high resolution. <P>SOLUTION: A holding device 10 of an optical element is equipped with: a first support member 2 which is annular and supports an optical element 1; a second support member 3 which is annular and is positioned on the outer diameter side of the first support member 2 to support the first support member 2; and a plurality of elastic members 4 which elastically deform and are positioned between the first support member 2 and the second support member 3. The elastic member 4 is a cylindrical member, and one end face of the cylindrical member is coupled to the first support member 2 in the optical axis direction of the optical element 1 while the other end face of the cylindrical member is coupled to the second support member 3. <P>COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011096720(A) 申请公布日期 2011.05.12
申请号 JP20090246635 申请日期 2009.10.27
申请人 CANON INC 发明人 YOSHIDA SETSUO
分类号 H01L21/027 主分类号 H01L21/027
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