| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a coating apparatus that can prevent coating liquids from mixing together by employing a valve capable of preventing the coating liquids from remaining in quantity on an outflow port side. <P>SOLUTION: A first valve element 53 closes a first passage 35 to connect a second passage 36 to a third passage 37. In the state of closing the first passage 35, the first valve element 53 serves as a part of the inner wall of a valve passage where a coating liquid flows from the second passage 36 to the third passage 37. A second valve element 54 closes the second passage 36 to connect the first passage 35 to the third passage 37. In the state of closing the second passage 36, the second valve element 54 serves as a part of the inner wall of a valve passage where a coating liquid flows from the first passage 35 to the third passage 37. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
