发明名称 TRANSPARENT CONDUCTIVE FILM HAVING FTO/ITO LAMINATE
摘要 A transparent conductive film for lamination on a substrate and comprising an ITO film and an FTO film, wherein a part or all of the crystal structure of a surface of the FTO film is orthorhombic, and a transparent conductive film for lamination on a substrate and comprising an ITO film and an FTO film, wherein the thickness of the FTO film is within a range from 5 nm to 20 nm and the FTO film is a continuous film. A method of producing the transparent conductive films includes depositing the ITO film on a substrate using a pyrosol process, and subsequently depositing the FTO film continuously on top of the ITO film.
申请公布号 US2011111215(A1) 申请公布日期 2011.05.12
申请号 US200913000206 申请日期 2009.06.22
申请人 NIPPON SODA CO., LTD. 发明人 YAMADA SHIGEO;OOASHI TATSUYA
分类号 B32B9/04;H01L21/283 主分类号 B32B9/04
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