| 摘要 |
PROBLEM TO BE SOLVED: To reduce vibration of a carrying device without lowering the efficiency of carrying a semiconductor device. SOLUTION: The device 90 for carrying the semiconductor device includes a carrying hand (first carrying hand 1) for holding the semiconductor device 3 and a carrying hand moving mechanism (first carrying hand moving mechanism 10) for moving the carrying hand. Further, the carrying device includes a weight (first weight 31) and a weight moving mechanism (first weight moving mechanism 40) for moving the weight. Furthermore, the carrying device includes a control unit 60 configured to control operations of the carrying hand moving mechanism and weight moving mechanism. The control unit 60 controls the operations of the carrying hand moving mechanism and weight moving mechanism so that the weight moves in the opposite direction from the carrying hand in synchronism with the movement of the carrying hand. COPYRIGHT: (C)2011,JPO&INPIT
|
