| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring device capable of improving measurement accuracy by an optical cutting method. SOLUTION: In this shape measuring device, a rotation error around a driving shaft in the X-direction of an optical cutting probe 22 is detected, based on a difference of each Y-coordinate of each center position of a reference sphere 31 determined by twice measuring processings performed separately at a prescribed interval dz in the Z-direction. Further, a rotation error around the driving shaft in the Z-direction of the optical cutting probe 22 is detected by performing converging calculation, based on a difference of each Y-coordinate of each center position of the reference sphere 31 determined by twice measuring processings performed separately at a prescribed interval dx in the X-direction. A rotation error around the driving shaft in the Y-direction of the optical cutting probe 22 is detected, based on a difference of each X-coordinate of each center position of the reference sphere 31 determined by twice measuring processings performed separately at a prescribed interval dz in the Z-direction, or based on inclination to a reference surface of a plane determined by a measuring processing by performing the measuring processing by using the known reference surface 32 orthogonal to the Z-axis as a specimen. This invention can be applied to, for example, a three-dimensional measuring device by the optical cutting method. COPYRIGHT: (C)2011,JPO&INPIT
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