发明名称 METHOD FOR PATTERNING CONDUCTIVE POLYMER
摘要 <p>PURPOSE: A method for patterning a conductive polymer is provided to manufacture a nano sized conductive polymer pattern by selective etching and depositing. CONSTITUTION: A metal pattern is made of a wire part(54). The wire part connects pad units on a substrate. A conductive polymer layer is formed on the metal pattern. The metal pattern located under the conductive polymer pattern is wet-etched. The wire part of the metal pattern is etched until the wire part is disconnected.</p>
申请公布号 KR20110049605(A) 申请公布日期 2011.05.12
申请号 KR20090106690 申请日期 2009.11.05
申请人 IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY) 发明人 YOO, BONG YOUNG;KIM, DONG WOOK
分类号 H01L21/027;H01L21/306;H01L51/00 主分类号 H01L21/027
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