发明名称 |
METHOD FOR PATTERNING CONDUCTIVE POLYMER |
摘要 |
<p>PURPOSE: A method for patterning a conductive polymer is provided to manufacture a nano sized conductive polymer pattern by selective etching and depositing. CONSTITUTION: A metal pattern is made of a wire part(54). The wire part connects pad units on a substrate. A conductive polymer layer is formed on the metal pattern. The metal pattern located under the conductive polymer pattern is wet-etched. The wire part of the metal pattern is etched until the wire part is disconnected.</p> |
申请公布号 |
KR20110049605(A) |
申请公布日期 |
2011.05.12 |
申请号 |
KR20090106690 |
申请日期 |
2009.11.05 |
申请人 |
IUCF-HYU (INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY) |
发明人 |
YOO, BONG YOUNG;KIM, DONG WOOK |
分类号 |
H01L21/027;H01L21/306;H01L51/00 |
主分类号 |
H01L21/027 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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