| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for improving resolution of a microscope when detecting an illuminated sample, and a microscope for implementing the method. <P>SOLUTION: At a first position, an illumination pattern (I) is formed on the sample (P), desirably, with resolution near or equal to or above optical resolution which can be nearly attained by the microscope, and relative displacement of the illumination pattern from a first position to at least one second position is performed on the sample at a step smaller than the resolution limit of the microscope, advantageously, perpendicularly to an illumination direction between detection and the illumination pattern (I) at least once. The detection and storage of a detection signal are performed not only at the first position but also at the second position. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
