| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical scanner such that both monitoring of deflection angle characteristics of an MEMS mirror and writing-out position timing control can be performed with high precision. SOLUTION: In the optical scanner 13 equipped with a detecting element (MEMS mirror) 27 deflecting a light beam L emitted from a light source 26 and BD sensors (optical detecting elements) 29 and 30 detecting light beams L1 and L2 deflected by the detecting element 27, the deflection angleθb1 of the light beam L1 for monitoring the deflection angle characteristics of the MEMS mirror, among the light beams L1 and L2 detected by the BD sensors 29 and 30, is set to be larger than the deflection angleθb2 of the light beam L2 for the writing-out position timing control (θb1>θb2). For example, the first BD sensor 29, which detects the light beam L1 for monitoring the deflection angle characteristics of the MEMS mirror, is disposed closer to an outer end side in a scanning direction than the second BD sensor 30 detecting the light beam L2 for the writing-out position timing control. COPYRIGHT: (C)2011,JPO&INPIT
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