发明名称 SPECIFIC PROGRAM, METHOD, AND DEVICE FOR SETTING INPUT PARAMETER VALUE
摘要 PROBLEM TO BE SOLVED: To appropriately set an input parameter value for simulation by introducing a novel index used for evaluating an error between a calculating value and a real measured value based on a simulation. SOLUTION: In each of set of set input variable value, an index related variation in real measured output variable values is calculated based on data stored in a real measured output variable value store part for storing a real measured output variable value about each of set of input variable value. A predetermined simulator calculates a calculated output variable value about a candidate input parameter value set and input variable value set, and a difference between the calculated output variable value and the real measured output variable value about the input variable value set is identified. Processing for calculating an overall error which is consideration result of a partial error evaluated by using an index about the input variable value set to all input variable value sets is repeated, thereby a candidate input parameter value set in which the overall error is minimum, is identified. COPYRIGHT: (C)2011,JPO&INPIT
申请公布号 JP2011096985(A) 申请公布日期 2011.05.12
申请号 JP20090252373 申请日期 2009.11.02
申请人 FUJITSU LTD 发明人 MATSUMOTO KAZUHIRO
分类号 H01L21/82;G06F17/50 主分类号 H01L21/82
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